Development of a compact X-ray source and super-sensitization of photo resists for soft X-ray imaging

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Development of a compact X-ray source and super-sensitization of photo resists for soft X-ray imaging

Call No. (NDL)
Z53-W515
Bibliographic ID of National Diet Library
10270321
Material type
記事
Author
Tomoko Gowaほか
Publisher
Chiba : The Society of Photopolymer Science and Technology
Publication date
2009
Material Format
Paper
Journal name
Journal of photopolymer science and technology 22(3) 2009
Publication Page
p.273~278
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Paper Digital

Material Type
記事
Author/Editor
Tomoko Gowa
Naoyuki Fukutake
Yoshimasa Hama 他
Periodical title
Journal of photopolymer science and technology
No. or year of volume/issue
22(3) 2009
Volume
22
Issue
3
Pages
273~278
Publication date of volume/issue (W3CDTF)
2009