Lateral liquid-phase epitaxy of Ge on insulator using Si seed for ultrahigh speed transistor (Silicon devices and materials)

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Lateral liquid-phase epitaxy of Ge on insulator using Si seed for ultrahigh speed transistor

(Silicon devices and materials)

Call No. (NDL)
Z16-940
Bibliographic ID of National Diet Library
10275439
Material type
記事
Author
T. Sadohほか
Publisher
東京 : 電子情報通信学会
Publication date
2009-06
Material Format
Paper
Journal name
電子情報通信学会技術研究報告 = IEICE technical report : 信学技報 109(98) 2009.6.24-26
Publication Page
p.177~180
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Paper

Material Type
記事
Author/Editor
T. Sadoh
T. Tanaka
Y. Ohta 他
Periodical title
電子情報通信学会技術研究報告 = IEICE technical report : 信学技報
No. or year of volume/issue
109(98) 2009.6.24-26
Volume
109
Issue
98
Pages
177~180