Effects of artificial pores and purity on the erosion behaviors of polycrystalline Al2O3 ceramics under fluorine plasma
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- Material Type
- 記事
- Author/Editor
- Dae-Min KimKyeong-Beom KimSo-Young Yoon 他
- Author Heading
- Periodical title
- Journal of the Ceramic Society of Japan = 日本セラミックス協会学術論文誌
- No. or year of volume/issue
- 117(1368) 2009.8
- Volume
- 117
- Issue
- 1368
- Pages
- 863～867
- Publication date of volume/issue (W3CDTF)
- 2009-08