紫外光分解反応を用いた減圧・高濃度オゾンガス分解装置

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Material Type: 記事
Title: 紫外光分解反応を用いた減圧・高濃度オゾンガス分解装置
Author/Editor: 亀田直人
西口哲也
森川良樹他
Author Heading: 亀田直人
西口哲也
森川良樹
Alternative Title: Ozone killer by UV-light irradiation for reduced pressure and high concentration ozone gas
Periodical title: Journal of the Vacuum Society of Japan = 真空
No. or year of volume/issue: 52(4) 2009.4
Volume: 52
Issue: 4
Pages: 245～247
Publication date of volume/issue (W3CDTF): 2009-04
ISSN (Periodical Title): 1882-2398
ISSN-L (Periodical Title): 1882-2398
Publication (Periodical Title): 東京 : 日本真空協会
Place of Publication (Country Code): JP
Text Language Code: jpn
NDLC: ZN15
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: Z16-474
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 10302396
http://id.ndl.go.jp/bib/10302396
Bibliographic Record Category (NDL): 632