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フレキシブル・ディスプレイ実現に向けた多結晶シリコン薄膜低温大粒径化

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フレキシブル・ディスプレイ実現に向けた多結晶シリコン薄膜低温大粒径化

Call No. (NDL)
Z16-B323
Bibliographic ID of National Diet Library
10336369
Material type
記事
Author
河本 直哉ほか
Publisher
吹田 : レーザ加工学会
Publication date
2009-03
Material Format
Paper
Journal name
レーザ加工学会誌 = Journal of Japan Laser Processing Society 16(1) 2009.3
Publication Page
p.51~53
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Paper

Material Type
記事
Author/Editor
河本 直哉
三好 正毅
松尾 直人 他
Alternative Title
Enlargement of polycrystalline silicon grain at low temperature to realize flexible displays
Periodical title
レーザ加工学会誌 = Journal of Japan Laser Processing Society
No. or year of volume/issue
16(1) 2009.3
Volume
16
Issue
1
Pages
51~53