Holdings of Libraries in Japan
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CiNii Research
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Bibliographic Record
You can check the details of this material, its authority (keywords that refer to materials on the same subject, author's name, etc.), etc.
- Material Type
- 記事
- Author/Editor
- 菅原 健太郎佐藤 理吉崎 和典 他
- Alternative Title
- Nanometrology of 2D gratings with an atomic force microscope
- Periodical title
- 光計測シンポジウム論文集
- No. or year of volume/issue
- 2007
- Volume
- 2007
- Pages
- 1～4
- Publication date of volume/issue (W3CDTF)
- 2007