プラズマ処理によるDAF実装の信頼性向上

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プラズマ処理によるDAF実装の信頼性向上

Call No. (NDL)
Z16-1617
Bibliographic ID of National Diet Library
10400885
Material type
記事
Author
古川 良太ほか
Publisher
東京 : エレクトロニクス実装学会
Publication date
2008-09
Material Format
Paper
Journal name
マイクロエレクトロニクスシンポジウム論文集 18 2008.9.18・19
Publication Page
p.35~38
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Paper Digital

Material Type
記事
Author/Editor
古川 良太
笹栗 真二
Alternative Title
The reliability improvement of the DAF bonding by plasma treatment
Periodical title
マイクロエレクトロニクスシンポジウム論文集
No. or year of volume/issue
18 2008.9.18・19
Volume
18
Pages
35~38
Publication date of volume/issue (W3CDTF)
2008-09