ガスデポジション法による円錐バンプの作製--MEMSデバイスの低温・低荷重ストレスフリー実装を目指して

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Material Type: 記事
Title: ガスデポジション法による円錐バンプの作製--MEMSデバイスの低温・低荷重ストレスフリー実装を目指して
Author/Editor: 居村史人
仲川博
菊地克弥他
Author Heading: 居村史人
仲川博
菊地克弥
Alternative Title: Fabrication of cone-shaped micro-bump by gas deposition method: for stress-free packaging with low-temperature and low-load for MEMS-devices
Periodical title: マイクロエレクトロニクスシンポジウム論文集
No. or year of volume/issue: 18 2008.9.18・19
Volume: 18
Pages: 191～194
Publication date of volume/issue (W3CDTF): 2008-09
Publication (Periodical Title): 東京 : エレクトロニクス実装学会
Place of Publication (Country Code): JP
Text Language Code: jpn
NDLC: ZN33
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: Z16-1617
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 10401946
http://id.ndl.go.jp/bib/10401946
Bibliographic Record Category (NDL): 632