Nanomechanical response of the Si lattice to hydrogen implantation and annealing for layer splitting
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- Material Type
- 記事
- Title
- Author/Editor
- Diefeng GuHelmut BaumgartKonstantin K. Bourdelle 他
- Author Heading
- Periodical title
- Japanese journal of applied physics : JJAP
- No. or year of volume/issue
- 48(10) 2009.10
- Volume
- 48
- Issue
- 10
- Pages
- 101202-1～4
- Publication date of volume/issue (W3CDTF)
- 2009-10