Characteristics of three-dimensional resonant vibration in a MEMS silicon beam resonator (25th sensor symposium)
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- Material Type
- 記事
- Author/Editor
- Takuya IshinoSho MakitaHiroshi Tanigawa 他
- Series Title
- Author Heading
- Periodical title
- 電気学会論文誌. E, センサ・マイクロマシン部門誌 = IEEJ transactions on sensors and micromachines
- No. or year of volume/issue
- 129(9) 2009.9
- Volume
- 129
- Issue
- 9
- Pages
- 289～294