静圧作動油に起因する超精密工作機械の熱変形抑制
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- Material Type
- 記事
- Author/Editor
- 鈴木 秀幸浦野 好市久米原 宏之 他
- Alternative Title
- Minimizing thermal deformation of ultraprecision machine tool induced by lubricating oil of hydrostatic bearings
- Periodical title
- 精密工学会誌 = Journal of the Japan Society for Precision Engineering / 会誌編集委員会 編
- No. or year of volume/issue
- 75(9) (通号 897) 2009.9
- Volume
- 75
- Issue
- 9
- Sequential issue number
- 897