磁場駆動型小型マイクロガスバルブの開発
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- Material Type
- 記事
- Title
- Author/Editor
- 小笠原 直樹岡崎 禎子斉藤 千尋 他
- Alternative Title
- Development of micro-gas valve driven by magnetic field
- Periodical title
- 日本金属学会誌 = The journal of the Japan Institute of Metals and Materials
- No. or year of volume/issue
- 73(10) 2009.10
- Volume
- 73
- Issue
- 10
- Pages
- 759～763