雑誌放射線
Volume number35(2) 2009.12
集束プロトンビーム描...

集束プロトンビーム描画による高アスペクト比構造の加工とその応用 (特集 高エネルギーイオンビームを用いたナノ・マイクロ構造創製技術とその応用)

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集束プロトンビーム描画による高アスペクト比構造の加工とその応用

(特集 高エネルギーイオンビームを用いたナノ・マイクロ構造創製技術とその応用)

Call No. (NDL)
Z15-432
Bibliographic ID of National Diet Library
10551087
Material type
記事
Author
西川 宏之
Publisher
[東京] : 応用物理学会放射線分科会
Publication date
2009-12
Material Format
Paper
Journal name
放射線 = Ionizing radiation 35(2) 2009.12
Publication Page
p.77~86
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Paper

Material Type
記事
Author/Editor
西川 宏之
Author Heading
Alternative Title
High-aspect-ratio structures by proton beam writing and its applications
Periodical title
放射線 = Ionizing radiation
No. or year of volume/issue
35(2) 2009.12
Volume
35
Issue
2