静電型,電磁型,圧電...

静電型,電磁型,圧電超音波型のマイクロアクチュエータ (小特集 最近の超音波モータの研究とその動向)

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静電型,電磁型,圧電超音波型のマイクロアクチュエータ(小特集 最近の超音波モータの研究とその動向)

Call No. (NDL)
Z15-15
Bibliographic ID of National Diet Library
10603786
Material type
記事
Author
Daniel Kuang-Chen Liuほか
Publisher
東京 : 日本音響学会
Publication date
2010-03
Material Format
Paper
Journal name
日本音響学会誌 66(3) 2010.3
Publication Page
p.114~118
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Paper Digital

Material Type
記事
Author/Editor
Daniel Kuang-Chen Liu
James Friend
Leslie Yeo 他
Alternative Title
A brief review of actuation at the micro-scale using electrostatics, electromagnetics and piezoelectric ultrasonics
Periodical title
日本音響学会誌
No. or year of volume/issue
66(3) 2010.3
Volume
66
Issue
3