雑誌精密工学会誌
Volume number76(5)-76(8)=905-908:2010.5-2010.8
Article有接点RF MEMS...

有接点RF MEMSスイッチ実用化技術 (特集 MEMS製品開発を支える精密工学)

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有接点RF MEMSスイッチ実用化技術(特集 MEMS製品開発を支える精密工学)

Call No. (NDL)
Z16-466
Bibliographic ID of National Diet Library
10699346
Material type
記事
Author
細谷 克己
Publisher
東京 : 精密工学会
Publication date
2010-05
Material Format
Paper
Journal name
精密工学会誌 = Journal of the Japan Society for Precision Engineering / 会誌編集委員会 編 76(5) (通号 905) 2010.5
Publication Page
p.498～501
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Material Type
記事
Title
有接点RF MEMSスイッチ実用化技術
Author/Editor
細谷 克己
Series Title
特集 MEMS製品開発を支える精密工学
Author Heading
細谷 克己
Alternative Title
Practical application technology of RF MEMS contact switch
Periodical title
精密工学会誌 = Journal of the Japan Society for Precision Engineering / 会誌編集委員会 編
No. or year of volume/issue
76(5) (通号 905) 2010.5
Volume
76
Issue
5