可視化観察による熱インプリントプロセスの特徴把握と実験的考察 (特集 マイクロ加工および支援技術)
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- Material Type
- 記事
- Author/Editor
- 齊藤 卓志川口 達也佐藤 勲
- Series Title
- Alternative Title
- Experimental analysis and characterization on thermal imprint process via in-situ observation
- Periodical title
- 電気学会論文誌. E, センサ・マイクロマシン部門誌 = IEEJ transactions on sensors and micromachines
- No. or year of volume/issue
- 130(8) 2010.8
- Volume
- 130
- Issue
- 8