大面積モールド作製プロセスおよびナノインプリント装置用アライメント技術 (特集 マイクロ加工および支援技術)
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- Material Type
- 記事
- Author/Editor
- 石橋 健太郎小久保 光典後藤 博史 他
- Series Title
- Alternative Title
- Fabrication process for large size mold and alignment method for nanoimprint system
- Periodical title
- 電気学会論文誌. E, センサ・マイクロマシン部門誌 = IEEJ transactions on sensors and micromachines
- No. or year of volume/issue
- 130(8) 2010.8
- Volume
- 130
- Issue
- 8