Room-temperature bonding of GaN to Al using Ar-beam surface activation (特集マイクロ加工および支援技術)

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Room-temperature bonding of GaN to Al using Ar-beam surface activation(特集マイクロ加工および支援技術)

Journal name: 電気学会論文誌. E, センサ・マイクロマシン部門誌 = IEEJ transactions on sensors and micromachines 130(8) 2010.8

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Material Type: 記事
Title: Room-temperature bonding of GaN to Al using Ar-beam surface activation
Author/Editor: Eiji Higurashi
Akihiro Kaneko
Masatake Akaike 他
Series Title: 特集マイクロ加工および支援技術
Author Heading: Eiji Higurashi
Akihiro Kaneko
Masatake Akaike
Periodical title: 電気学会論文誌. E, センサ・マイクロマシン部門誌 = IEEJ transactions on sensors and micromachines
No. or year of volume/issue: 130(8) 2010.8
Volume: 130
Issue: 8
Pages: 369～372
Publication date of volume/issue (W3CDTF): 2010-08
ISSN (Periodical Title): 1341-8939
ISSN-L (Periodical Title): 1341-8939
Publication (Periodical Title): 東京 : 電気学会
Place of Publication (Country Code): JP
Text Language Code: eng
Subject Heading: room-temperature bonding
GaN
metal contacts
heterogeneous integration
NDLC: ZN31
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: Z16-B380
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 10765374
http://id.ndl.go.jp/bib/10765374
Bibliographic Record Category (NDL): 632