完全追従制御法を用いた大型ステージのモデルの妥当性検証と精密位置決め制御
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- Material Type
- 記事
- Author/Editor
- 佐伯 和明下山 隆司坂田 晃一 他
- Alternative Title
- Investigation of an appropriate nominal model and high-precision positioning of large-scale stage using perfect tracking control
- Periodical title
- 電気学会論文誌. D, 産業応用部門誌 = IEEJ transactions on industry applications
- No. or year of volume/issue
- 130(8) 2010.8
- Volume
- 130
- Issue
- 8
- Pages
- 1022～1029