プラズマ経由気相プロセス物理気相成長法による超ナノ微結晶ダイヤモンド/水素化アモルファスカーボン混相膜の創製とその化学結合構造 (ミニ特集ナノ構造の形成プロセスと特異な性質)

プラズマ経由気相プロセス物理気相成長法による超ナノ微結晶ダイヤモンド/水素化アモルファスカーボン混相膜の創製とその化学結合構造

(ミニ特集ナノ構造の形成プロセスと特異な性質)

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Material Type: 記事
Title: プラズマ経由気相プロセス物理気相成長法による超ナノ微結晶ダイヤモンド/水素化アモルファスカーボン混相膜の創製とその化学結合構造
Author/Editor: 吉武剛
Series Title: ミニ特集ナノ構造の形成プロセスと特異な性質
Author Heading: 吉武剛
Alternative Title: Chemical bonding structures of ultrananocrystalline diamond/hydrogenated amorphous carbon composite films prepared by physical vapor deposition
Periodical title: まてりあ = Materia Japan
No. or year of volume/issue: 49(7) 2010.7
Volume: 49
Issue: 7
Pages: 317～319
Publication date of volume/issue (W3CDTF): 2010-07
ISSN (Periodical Title): 1340-2625
ISSN-L (Periodical Title): 1340-2625
Publication (Periodical Title): 仙台 : 日本金属学会 ; 1994-
Place of Publication (Country Code): JP
Text Language Code: jpn
Subject Heading: ultrananocrystalline diamond
UNCD
thin film
PVD
coaxial arc plasma
NEXAFS
XPS
hardness
modules
NDLC: ZP41
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: Z17-313
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 10766467
http://id.ndl.go.jp/bib/10766467
Bibliographic Record Category (NDL): 632