異物起因歩留りの予測手法
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- Material Type
- 記事
- Title
- Author/Editor
- 小野 眞岩田 尚史馬場 毅 他
- Alternative Title
- Particle-limited yield prediction method
- Periodical title
- 電気学会論文誌. C, 電子・情報・システム部門誌 = IEEJ transactions on electronics, information and systems
- No. or year of volume/issue
- 130(8) 2010.8
- Volume
- 130
- Issue
- 8
- Pages
- 1404～1410