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雑誌Iwasaki技報
Volume number(22) 2010.6
Article活性酸素プロセス下で...

活性酸素プロセス下での銀薄膜表面酸化挙動の解明

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活性酸素プロセス下での銀薄膜表面酸化挙動の解明

Call No. (NDL)
Z74-E532
Bibliographic ID of National Diet Library
10768390
Material type
記事
Author
松本 裕之ほか
Publisher
東京 : 岩崎電気
Publication date
2010-06
Material Format
Paper
Journal name
Iwasaki技報 (22) 2010.6
Publication Page
p.13～17
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Paper

Material Type
記事
Title
活性酸素プロセス下での銀薄膜表面酸化挙動の解明
Author/Editor
松本 裕之
柴田 好久
吉野 潔 他
Author Heading
松本 裕之
柴田 好久
吉野 潔
Periodical title
Iwasaki技報
No. or year of volume/issue
(22) 2010.6
Issue
22
Pages
13～17
Publication date of volume/issue (W3CDTF)
2010-06
Publication (Periodical Title)
東京 : 岩崎電気