完全ドライプロセスのレーザダイシング技術--ステルスダイシング (特集 研究開発とイノベーションのシステム論--価値創成のための統合的アプローチ)
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CiNii Research
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- Material Type
- 記事
- Author/Editor
- 内山 直己
- Series Title
- Author Heading
- Alternative Title
- Complete dry process laser dicing: the stealth dicing
- Periodical title
- 精密工学会誌 = Journal of the Japan Society for Precision Engineering / 会誌編集委員会 編
- No. or year of volume/issue
- 76(7) (通号 907) 2010.7
- Volume
- 76
- Issue
- 7