干渉顕微鏡観察下の粗面の垂直走査域100μmでの光路差変化の高精度測定
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- Material Type
- 記事
- Author/Editor
- 安達 正明河村 昌範岩尾 雄太
- Alternative Title
- Precision OPD change measurement in a 100-μm vertical-scanning range
- Periodical title
- 精密工学会誌 = Journal of the Japan Society for Precision Engineering / 会誌編集委員会 編
- No. or year of volume/issue
- 76(7) (通号 907) 2010.7
- Volume
- 76
- Issue
- 7
- Sequential issue number
- 907