Effect of heat treatment on the hardness of Ti-Mo-N films deposited by RF reactive magnetron sputtering
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- Material Type
- 記事
- Author/Editor
- Shoko KomiyamaYuji SutouJunichi Koike
- Author Heading
- Periodical title
- Materials transactions
- No. or year of volume/issue
- 51(8) 2010.8
- Volume
- 51
- Issue
- 8
- Pages
- 1467～1473
- Publication date of volume/issue (W3CDTF)
- 2010-08