年間特集「水」--アナリティカルレポート気相分解/誘導結合プラズマ質量分析法を用いたシリコンウェハー表面金属分析による超純水水質評価

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Material Type: 記事
Title: 年間特集「水」--アナリティカルレポート気相分解/誘導結合プラズマ質量分析法を用いたシリコンウェハー表面金属分析による超純水水質評価
Author/Editor: 加藤俊正
星重行
野口俊彦他
Author Heading: 加藤俊正
星重行
野口俊彦
Alternative Title: Evaluation of the cleanliness of ultrapure water by the analysis for metal concentration deposited on Si wafer surface using Vapor Phase Decomposition/Inductively Coupled Plasma Mass Spectrometry
Periodical title: 分析化学 / 日本分析化学会編
No. or year of volume/issue: 59(7) (通号 678) 2010.7
Volume: 59
Issue: 7
Sequential issue number: 678
Pages: 559～563
Publication date of volume/issue (W3CDTF): 2010-07
ISSN (Periodical Title): 0525-1931
ISSN-L (Periodical Title): 0525-1931
Publication (Periodical Title): 東京 : 日本分析化学会
Place of Publication (Country Code): JP
Text Language Code: jpn
Subject Heading: VPD
ICP-MS
metal contamination
ultrapure water
cleanliness
NDLC: ZP4
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: Z17-9
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 10773113
http://id.ndl.go.jp/bib/10773113
Bibliographic Record Category (NDL): 632