Raman spectroscopic stress evaluation of femtosecond-laser-modified region inside 4H-SiC

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Material Type: 記事
Title: Raman spectroscopic stress evaluation of femtosecond-laser-modified region inside 4H-SiC
Author/Editor: 山本稔
出来真斗
高橋智則他
Author Heading: 山本稔
出来真斗
高橋智則
Alternative Title: 4H-SiC内部のフェムト秒レーザー改質部におけるラマン分光学的応力評価
Periodical title: 技研所報
No. or year of volume/issue: 46(3) (通号 141) 2010.7
Volume: 46
Issue: 3
Sequential issue number: 141
Pages: 92～94
Publication date of volume/issue (W3CDTF): 2010-07
ISSN (Periodical Title): 0289-243X
ISSN-L (Periodical Title): 0289-243X
Publication (Periodical Title): 東久留米 : 機械振興協会技術研究所
Place of Publication (Country Code): JP
Text Language Code: eng
NDLC: ZM5
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: Z14-506
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 10778207
http://id.ndl.go.jp/bib/10778207
Bibliographic Record Category (NDL): 632