Application of PSI/SCM microscope for nanoindentation tester

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Application of PSI/SCM microscope for nanoindentation tester

Call No. (NDL)
Z14-506
Bibliographic ID of National Diet Library
10778278
Material type
記事
Author
藤塚 将行ほか
Publisher
東久留米 : 機械振興協会技術研究所
Publication date
2010-07
Material Format
Paper
Journal name
技研所報 46(3) (通号 141) 2010.7
Publication Page
p.117~120
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Paper

Material Type
記事
Author/Editor
藤塚 将行
山口 誠
上野 滋 他
Alternative Title
共焦点・位相シフト干渉顕微鏡のナノインデンターへの応用
Periodical title
技研所報
No. or year of volume/issue
46(3) (通号 141) 2010.7
Volume
46
Issue
3
Sequential issue number
141