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Bibliographic Record
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- Material Type
- 記事
- Author/Editor
- 深津 茂人平野 泉三谷 祐一郎
- Alternative Title
- High-reliability technology for metal gate/high-k gate dielectrics for advanced LSIs
- Periodical title
- 東芝レビュー = Toshiba review / 東芝ビジネスエキスパート株式会社ビジネスソリューション事業部 編集・制作
- No. or year of volume/issue
- 65(7) (通号 733) 2010.7
- Volume
- 65
- Issue
- 7
- Sequential issue number
- 733