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雑誌住友電工テクニカルレビュー : 住友電工グループ技術論文誌
Volume number(177) 2010.7
Article窒化アルミニウム単結...

窒化アルミニウム単結晶基板の開発

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窒化アルミニウム単結晶基板の開発

Call No. (NDL)
Z16-298
Bibliographic ID of National Diet Library
10792897
Material type
記事
Author
佐藤 一成ほか
Publisher
大阪 : 住友電気工業
Publication date
2010-07
Material Format
Paper
Journal name
住友電工テクニカルレビュー = Technical review : 住友電工グループ技術論文誌 (177) 2010.7
Publication Page
p.87～91
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Paper

Material Type
記事
Title
窒化アルミニウム単結晶基板の開発
Author/Editor
佐藤 一成
荒川 聡
谷崎 圭祐 他
Author Heading
佐藤 一成
荒川 聡
谷崎 圭祐
Alternative Title
Development of aluminum nitride single crystal substrates
Periodical title
住友電工テクニカルレビュー = Technical review : 住友電工グループ技術論文誌
No. or year of volume/issue
(177) 2010.7
Issue
177
Pages
87～91
Publication date of volume/issue (W3CDTF)
2010-07