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ファイバ-固体ハイブリッドパルス199nmレーザ光源の開発

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ファイバ-固体ハイブリッドパルス199nmレーザ光源の開発

Call No. (NDL)
Z16-B323
Bibliographic ID of National Diet Library
10796374
Material type
記事
Author
篠崎 琢也ほか
Publisher
吹田 : レーザ加工学会
Publication date
2010-04
Material Format
Paper
Journal name
レーザ加工学会誌 = Journal of Japan Laser Processing Society 17(1・2) 2010.4
Publication Page
p.65~67
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Paper

Material Type
記事
Author/Editor
篠崎 琢也
浦田 佳治
和田 芳夫 他
Alternative Title
Development of pulse DUV laser at 199 nm using fiber-bulk hybrid amplifier
Periodical title
レーザ加工学会誌 = Journal of Japan Laser Processing Society
No. or year of volume/issue
17(1・2) 2010.4
Volume
17
Issue
1・2
Pages
65~67