表面差分反射分光と反射率差分光によるSi表面上のO2,NO,CO反応の研究 (MH賞)

表面差分反射分光と反射率差分光によるSi表面上のO2,NO,CO反応の研究

(MH賞)

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Material Type: 記事
Title: 表面差分反射分光と反射率差分光によるSi表面上のO2,NO,CO反応の研究
Author/Editor: 大野真也
Series Title: MH賞
Author Heading: 大野真也
Periodical title: Readout : Horiba technical reports
No. or year of volume/issue: (36) 2010.5
Issue: 36
Pages: 38～43
Publication date of volume/issue (W3CDTF): 2010-05
ISSN (Periodical Title): 0915-9916
ISSN-L (Periodical Title): 0915-9916
Publication (Periodical Title): 京都 : 堀場製作所
Place of Publication (Country Code): JP
Text Language Code: jpn
NDLC: ZM15
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: Z14-1710
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 10796909
http://id.ndl.go.jp/bib/10796909
Bibliographic Record Category (NDL): 632