薄硬質材と薄軟質材の積層工具を用いた超音波加工による微細溝群の創成

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薄硬質材と薄軟質材の積層工具を用いた超音波加工による微細溝群の創成

Call No. (NDL)
Z16-1147
Bibliographic ID of National Diet Library
10799017
Material type
記事
Author
篠塚 淳
Publisher
東京 : 砥粒加工学会
Publication date
2010-08
Material Format
Paper
Journal name
Abrasive technology : 砥粒加工学会誌 : journal of the Japan Society for Abrasive Technology 54(8) (通号 336) 2010.8
Publication Page
p.482~487
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Paper

Material Type
記事
Author/Editor
篠塚 淳
Author Heading
Alternative Title
Fabrication of multiple microgrooves by ultrasonic machining with a tool that laminates thin hard-material and thin soft-material
Periodical title
Abrasive technology : 砥粒加工学会誌 : journal of the Japan Society for Abrasive Technology
No. or year of volume/issue
54(8) (通号 336) 2010.8
Volume
54
Issue
8
Sequential issue number
336