発光分光計測を用いたプロセスプラズマの診断 (特集 日本のプラズマ研究最前線)
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CiNii Research
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- Material Type
- 記事
- Author/Editor
- 赤塚 洋
- Series Title
- Author Heading
- Alternative Title
- Optical emission spectroscopy measurement of processing plasmas
- Periodical title
- 電気学会論文誌. A, 基礎・材料・共通部門誌 = IEEJ transactions on fundamentals and materials
- No. or year of volume/issue
- 130(10) 2010.10
- Volume
- 130
- Issue
- 10