ハーフトーンマスク用二層レジスト技術の開発
Digital data available（Japan Link Center）
Begin reading now
CiNii Research
Holdings of Libraries in Japan
This page shows libraries in Japan other than the National Diet Library that hold the material.
Please contact your local library for information on how to use materials or whether it is possible to request materials from the holding libraries.
other
CiNii Research
Search ServiceDigitalYou can check the holdings of institutions and databases with which CiNii Research is linked at the site of CiNii Research.
Bibliographic Record
You can check the details of this material, its authority (keywords that refer to materials on the same subject, author's name, etc.), etc.
- Material Type
- 記事
- Author/Editor
- 山本 雅史加藤 大輝河野 昭彦 他
- Alternative Title
- Development of two-layer resist technology for the halftone mask
- Periodical title
- 高分子論文集 = Japanese journal of polymer science and technology
- No. or year of volume/issue
- 67(9) 2010
- Volume
- 67
- Issue
- 9
- Pages
- 506～510