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CiNii Research
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Bibliographic Record
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- Material Type
- 記事
- Author/Editor
- 中尾 昭和山本 雅史河野 昭彦 他
- Alternative Title
- Relationship between the development property and the photo active compound contents of the positive-tone novolak resist
- Periodical title
- 電子情報通信学会論文誌. C, エレクトロニクス = The IEICE transactions on electronics. C / 電子情報通信学会 編
- No. or year of volume/issue
- 93(10) (通号 514) 2010.10
- Volume
- 93
- Issue
- 10
- Sequential issue number
- 514