微細CMOSの多層配線における光学特性の評価 (情報センシング)
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- Material Type
- 記事
- Author/Editor
- 池田 誠
- Series Title
- Author Heading
- Alternative Title
- Analysis on characteristics of light transmission for multiple-metal layer nano-meter CMOS
- Periodical title
- 映像情報メディア学会技術報告 = ITE technical report
- No. or year of volume/issue
- 34(38) 2010.9
- Volume
- 34
- Issue
- 38