雑誌表面技術
Volume number61(7)-61(12):2010.7-2010.12
Article小特集 ドライプロセ...

小特集 ドライプロセスによるバリア膜形成の原理とその応用

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小特集 ドライプロセスによるバリア膜形成の原理とその応用

Call No. (NDL)
Z17-291
Bibliographic ID of National Diet Library
10861349
Material type
記事
Author
-
Publisher
東京 : 表面技術協会
Publication date
2010-10
Material Format
Paper
Journal name
表面技術 = Journal of the Surface Finishing Society of Japan 61(10) 2010.10
Publication Page
p.670～693
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Paper

Material Type
記事
Title
小特集 ドライプロセスによるバリア膜形成の原理とその応用
Alternative Title
Special feature: Principle and application of barrier film formation by dry processing
Periodical title
表面技術 = Journal of the Surface Finishing Society of Japan
No. or year of volume/issue
61(10) 2010.10
Volume
61
Issue
10
Pages
670～693
Publication date of volume/issue (W3CDTF)
2010-10
ISSN (Periodical Title)
0915-1869