Etching characteristics of fabricated grooves on silicon solar cell using surface discharge plasma (Special issue on 2009 Korea-Japan Joint Symposium on Electrical Discharge and High Voltage Engineering)
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- Material Type
- 記事
- Title
- Author/Editor
- Toshiyuki HamadaTatsuya Sakoda
- Series Title
- Author Heading
- Periodical title
- 電気学会論文誌. A, 基礎・材料・共通部門誌 = IEEJ transactions on fundamentals and materials
- No. or year of volume/issue
- 130(11) 2010.11
- Volume
- 130
- Issue
- 11
- Pages
- 999~1003