光技術の研究開発・特許動向2/技術別に見る最新情報(第156回)レーザによる露光技術

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Material Type: 記事
Title: 光技術の研究開発・特許動向2/技術別に見る最新情報(第156回)レーザによる露光技術
Author/Editor: 嶋本久寿弥太
Author Heading: 嶋本久寿弥太
Periodical title: Optronics : 光技術コーディネートジャーナル
No. or year of volume/issue: 29(12) (通号 348) 2010.12
Volume: 29
Issue: 12
Sequential issue number: 348
Pages: 194～197
Publication date of volume/issue (W3CDTF): 2010-12
ISSN (Periodical Title): 0286-9659
ISSN-L (Periodical Title): 0286-9659
Publication (Periodical Title): 東京 : オプトロニクス社
Place of Publication (Country Code): JP
Text Language Code: jpn
NDLC: ZN33
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: Z16-1255
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 10931137
http://id.ndl.go.jp/bib/10931137
Bibliographic Record Category (NDL): 632