3族窒化物/SiCヘテロ界面を用いたワイドギャップ半導体デバイス (特集 新ヘテロ界面の実現に向けた半導体結晶成長技術の進展)
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- Material Type
- 記事
- Author/Editor
- 須田 淳三宅 裕樹木本 恒暢
- Series Title
- Alternative Title
- Wide-bandgap semiconductor devices using group-3 nitride/SiC heterointerface
- Periodical title
- 表面科学 = Journal of the Surface Science Society of Japan / 日本表面科学会 編
- No. or year of volume/issue
- 31(12) 2010.12
- Volume
- 31
- Issue
- 12