シリコンドライエッチング技術の発展史 (特集 プロセス技術)
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- Material Type
- 記事
- Title
- Author/Editor
- 大原 淳士竹内 幸裕
- Series Title
- Alternative Title
- Technological history of silicon dry etching process
- Periodical title
- 電気学会論文誌. E, センサ・マイクロマシン部門誌 = IEEJ transactions on sensors and micromachines
- No. or year of volume/issue
- 131(1) 2011.1
- Volume
- 131
- Issue
- 1