流体MEMSキャパシタの高周波等価回路モデルの検討
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- Material Type
- 記事
- Author/Editor
- 石田 勝通北村 和義古塚 岐 他
- Alternative Title
- Equivalent RF circuit model on fluid MEMS capacitors
- Periodical title
- 電気学会論文誌. E, センサ・マイクロマシン部門誌 = IEEJ transactions on sensors and micromachines
- No. or year of volume/issue
- 131(1) 2011.1
- Volume
- 131
- Issue
- 1
- Pages
- 35～39