UVレーザによる高アスペクト比小径穴あけ加工(第3報)パルス幅の影響
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- Material Type
- 記事
- Author/Editor
- 比田井 洋史伊東 翔戸倉 和
- Alternative Title
- High-aspect-ratio microdrilling with UV laser ablation (3) Influence of pulse width on hole profile
- Periodical title
- 精密工学会誌 = Journal of the Japan Society for Precision Engineering / 会誌編集委員会 編
- No. or year of volume/issue
- 76(12) (通号 912) 2010.12
- Volume
- 76
- Issue
- 12
- Sequential issue number
- 912