アクティブマスダンパによる露光装置の性能改善
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- Material Type
- 記事
- Author/Editor
- 高橋 正人涌井 伸二牧野内 進
- Alternative Title
- Performance improvement of semiconductor lithograph machine using active mass damper system
- Periodical title
- 日本機械学会論文集. C編
- No. or year of volume/issue
- 76(772) 2010.12
- Volume
- 76
- Issue
- 772
- Pages
- 3350～3356