ゴムを用いた電磁アクチュエータによる顕微作業用多自由度精密ステージの開発
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- Material Type
- 記事
- Author/Editor
- 野村 健作則次 俊郎
- Alternative Title
- Development of multi-degrees-of-freedom microscope stage constructed of electromagnetic actuator using rubber
- Periodical title
- 日本機械学会論文集. C編
- No. or year of volume/issue
- 76(772) 2010.12
- Volume
- 76
- Issue
- 772
- Pages
- 3672～3679