Selected topics in Applied physics: Technology evolution for silicon nano-electronics

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Material Type: 記事
Title: Selected topics in Applied physics: Technology evolution for silicon nano-electronics
Author/Editor: Toshiro Hiramoto
Seiichi Miyazaki
Akira Sakai 他
Author Heading: Toshiro Hiramoto
Seiichi Miyazaki
Akira Sakai
Periodical title: Japanese journal of applied physics : JJAP
No. or year of volume/issue: 50(1) (1) 2011.1
Volume: 50
Issue: 1
Other Volume: 1
Pages: 010101-1～010112-6,巻頭1枚
Publication date of volume/issue (W3CDTF): 2011-01
ISSN (Periodical Title): 0021-4922
ISSN-L (Periodical Title): 0021-4922
Publication (Periodical Title): Tokyo : The Japan Society of Applied Physics
Place of Publication (Country Code): JP
Text Language Code: eng
NDLC: ZM35
Target Audience: 一般
Article Type: 記事種別: 特集
Holding library: 国立国会図書館
Call No.: Z53-A375
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 10947996
http://id.ndl.go.jp/bib/10947996
Bibliographic Record Category (NDL): 632