ESDガンの垂直結合板への間接放電で生ずる空間電磁界のばらつき
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- Material Type
- 記事
- Author/Editor
- 辻 拓朗高 義礼藤原 修 他
- Alternative Title
- Variations in electromagnetic fields spatially induced for indirect discharges of ESD-Gun onto vertical coupling plane
- Periodical title
- 電気学会論文誌. A, 基礎・材料・共通部門誌 = IEEJ transactions on fundamentals and materials
- No. or year of volume/issue
- 131(2) 2011.2
- Volume
- 131
- Issue
- 2
- Pages
- 119～124