真空度検知機能を有する赤外線イメージセンサ
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CiNii Research
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- Material Type
- 記事
- Author/Editor
- 石井 浩一舟木 英之八木 均 他
- Alternative Title
- Infrared radiation image sensor with function of vacuum pressure detection
- Periodical title
- 電気学会論文誌. E, センサ・マイクロマシン部門誌 = IEEJ transactions on sensors and micromachines
- No. or year of volume/issue
- 131(2) 2011.2
- Volume
- 131
- Issue
- 2
- Pages
- 70～74