Bibliographic Record
You can check the details of this material, its authority (keywords that refer to materials on the same subject, author's name, etc.), etc.
- Material Type
- 記事
- Author/Editor
- 長南 隆之片桐 麦川上 徹 他
- Series Title
- Alternative Title
- 3D SEM measurement of micro-optical-element shape by nanoparticle scattering
- Periodical title
- 電子情報通信学会技術研究報告 = IEICE technical report : 信学技報
- No. or year of volume/issue
- 110(404) 2011.1.28・29
- Volume
- 110
- Issue
- 404